Tunable MEMS Actuated Microring Resonators

Abstract

A simplified process has been developed to fabricate MEMS tunable microring resonators on six-inch silicon-on-insulator wafers. Deep UV lithography is used to create 220-nm-wide waveguides and microrings. The process is CMOS compatible. The transmission spectra change from a double resonance dip (under-coupling) to a broader single resonance dip (over… (More)

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3 Figures and Tables