Trends in High Density DRAMs

Abstract

This paper presents a technical perspective for a high density DRAM especially a IM DRAM. From extrapolation of past trends in memory capacity vs. size, chip size will be 50 to 60 mm2. This will be realized by improving the cell structure, the dieletric layer for a cell or both. The good candidates are the corrugated capacitor cell (CCC) and stacked… (More)

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