Trends and perspectives for electrical characterization and reliability assessment in advanced CMOS technologies

  title={Trends and perspectives for electrical characterization and reliability assessment in advanced CMOS technologies},
  author={Guido Groeseneken and Robin Degraeve and Ben Kaczer and Koen Martens},
  journal={2010 Proceedings of the European Solid State Device Research Conference},
In this paper we give a brief historical review of the evolution of device reliability research over the past decades. Then we give some examples on how established characterization techniques that were developed for silicon based devices can be completely misinterpreted when applied to Ge or III–V based MOS-structures, and how a simple modification of the technique can ensure a correct interpretation. We also show how novel techniques, such as TSCIS (Trap spectroscopy by Charge Injection and… CONTINUE READING
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