Travel range extension of a MEMS electrostatic microactuator

  title={Travel range extension of a MEMS electrostatic microactuator},
  author={Damrongrit Piyabongkarn and Yu Sun and Rajesh Rajamani and A. Serdar Sezen and Bradley J. Nelson},
  journal={IEEE Transactions on Control Systems Technology},
Electrostatic comb microactuators have had a fundamental limitation in that the allowable travel range is limited to one-third of the total gap between comb fingers. Travel beyond this allowable range results in "pull-in" instability, independent of mechanical design parameters such as stiffness and mass. This brief focuses on the development of an active control system that stabilizes the actuator and allows travel almost over the entire available gap between comb fingers. The challenges to be… CONTINUE READING
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