Transport Properties of Beam-Deposited Pt Nanowires

Abstract

Pt wires were fabricated by using electron-beam (EB) and Ga focused-ion-beam (FIB) irradiation while providing C5H5Pt(CH3)3 gas through a nozzle. Electron transport properties of the wires were investigated. The resistance of the EB-deposited wires was quite high as deposited but was reduced by 3–4 orders of magnitude after 400–500C annealing. The electron… (More)

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