Transmission Electron Beam Drilling for Nanoscale Fabrication

@inproceedings{Lin2010TransmissionEB,
  title={Transmission Electron Beam Drilling for Nanoscale Fabrication},
  author={Tsan-Chu Lin and Rui-Zhi Su and Yu-cheng Lai and Dau-Chung Wang and Cen Shawn Wu},
  year={2010}
}
We demonstrated that a high-resolution focused electron beam can be used to fabricate metal nanostructures and devices on insulating membranes by nanosculpting metal films. This top-down focused electron beam drilling method works by the controlled ablation of materias to produce nanoscale devices with near-atomic the precision. In addition, we have fabricated a single-electron transistor (SET) on free-standing transparent Si3N4 membranes, which permits enables us to explore quantum tunneling… CONTINUE READING