Transient analysis of carrier gas saturation in liquid source vapor generators

@inproceedings{Mayer2001TransientAO,
  title={Transient analysis of carrier gas saturation in liquid source vapor generators},
  author={Bruce Mayer and Craig Collins and Mike Walton},
  year={2001}
}
  • Bruce Mayer, Craig Collins, Mike Walton
  • Published 2001
  • Chemistry
  • Bubbler-based chemical vapor generators find wide application in the fabrication of electronic devices. Bubblers generate a carrier-gas+chemical-vapor mixture to supply the device-processing chamber with reactive chemicals. The “dry” carrier gas bubbles through the liquid source chemical, becoming “humidified” with the chemical vapor in the process. This physical-theory-based analysis provides an estimate of the degree of humidification, or saturation, that the dry carrier gas achieves during… CONTINUE READING

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