Tracing the migration history of metal catalysts in metal-assisted chemically etched silicon.

@article{Gder2013TracingTM,
  title={Tracing the migration history of metal catalysts in metal-assisted chemically etched silicon.},
  author={Firat G{\"u}der and Yang Yang and Umut M. K{\"u}c{\"u}kbayrak and Margit Zacharias},
  journal={ACS nano},
  year={2013},
  volume={7 2},
  pages={
          1583-90
        }
}
Three-dimensional (3D) visualization of complex embedded nanopore networks in silicon requires expensive machinery and tedious sample preparation procedures such as electron tomography, also known as 3D transmission electron microscopy. In this article, we report a new, fast, powerful, and low-cost three-dimensional imaging technique with sub-5 nm resolution. This new imaging method is applied to metal-assisted chemically etched monocrystalline Si to demonstrate its capabilities. The AFEI… CONTINUE READING
BETA

Citations

Publications citing this paper.
SHOWING 1-8 OF 8 CITATIONS

References

Publications referenced by this paper.
SHOWING 1-10 OF 19 REFERENCES

Quantification of Mesoporosity of Zeolite Y Electron Tomography Study

  • J. Zecevic, C. J. Gommes, H. Friedrich, P. E. de Jongh, K. P. de Jong
  • Angew. Chem., Int Ed ,
  • 2012
1 Excerpt

Similar Papers

Loading similar papers…