Total internal reflection microscopy: a surface inspection technique.

  title={Total internal reflection microscopy: a surface inspection technique.},
  author={Patricia A. Temple},
  journal={Applied optics},
  volume={20 15},
Structure at and near the surface of a transparent sample or in a film on a transparent substrate can be observed by illuminating the sample from within using a well-collimated polarized laser beam incident at an angle equal to or greater than the critical angle of the sample material and examining the air side of the surface using an optical microscope. Although the technique is similar to dark-field microscopy, additional information can be obtained here concerning the size and depth of… CONTINUE READING
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