Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles

@article{Harvey2012TotalIS,
  title={Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles},
  author={J. E. Harvey and S. Schr{\"o}der and Narak Choi and A. Duparr{\'e}},
  journal={Optical Engineering},
  year={2012},
  volume={51},
  pages={013402}
}
Surface scatter effects from residual optical fabrication errors can severely degrade optical performance. The total integrated scatter (TIS) from a given mirror surface is determined by the ratio of the spatial frequency band-limited "relevant" root-mean-square surface roughness to the wavelength of light. For short-wavelength (extreme-ultraviolet/x-ray) applications, even state-of-the-art optical surfaces can scatter a significant fraction of the total reflected light. In this paper we first… Expand
Integrating optical fabrication and metrology into the optical design process.
Integrating optical fabrication and metrology into the optical design process
  • J. E. Harvey
  • Engineering, Materials Science
  • Other Conferences
  • 2014
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Domain of validity of the equation for total integrated scatter (TIS)
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