Total integrated scatter from surfaces with arbitrary roughness , correlation widths , and incident angles

  title={Total integrated scatter from surfaces with arbitrary roughness , correlation widths , and incident angles},
  author={James E. Harvey and Sven Schr{\"o}der and Narak Choi and Angela Duparr{\'e}},
Surface scatter effects from residual optical fabrication errors can severely degrade optical performance. The total integrated scatter (TIS) from a given mirror surface is determined by the ratio of the spatial frequency band-limited " relevant " root-mean-square surface roughness to the wavelength of light. For short-wavelength (extreme-ultraviolet/x-ray) applications, even state-of-the-art optical surfaces can scatter a significant fraction of the total reflected light. In this paper we… CONTINUE READING
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