Titanium borides deposited by chemical vapor deposition thermodynamic calculation and experiments

Abstract

The deposition conditions of titanium diboride and titanium monoboride were calculated under the thermodynamic equilibrium assumption and experimentally checked. The theoretical deposition diagram was calculated by the SOLGASMIX program. A11 the gaseous and condensed species were taken into account. The initial gas mixture was composed of titanium… (More)

Topics

6 Figures and Tables

Cite this paper

@inproceedings{Nadal2016TitaniumBD, title={Titanium borides deposited by chemical vapor deposition thermodynamic calculation and experiments}, author={M. Nadal and Typhaine Grenet and F. Teyssandier}, year={2016} }