Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators

  title={Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators},
  author={Wenjun Liao and Wenjing Liu and Yongming Tang and Baobing Wang and Huikai Xie},
  journal={The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror based on an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scan around two in-plane orthogonal axes as well as out-of-plane piston motion. The measured resonant frequencies of the fabricated… CONTINUE READING