Timing Yield-Aware Color Reassignment and Detailed Placement Perturbation for Bimodal CD Distribution in Double Patterning Lithography

@article{Gupta2010TimingYC,
  title={Timing Yield-Aware Color Reassignment and Detailed Placement Perturbation for Bimodal CD Distribution in Double Patterning Lithography},
  author={Mohit Gupta and Kwangok Jeong and Andrew B. Kahng},
  journal={IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems},
  year={2010},
  volume={29},
  pages={1229-1242}
}
Double patterning lithography (DPL) is in current production for memory products, and is widely viewed as inevitable for logic products at the 32 nm node. DPL decomposes and prints the shapes of a critical-layer layout in two exposures. In traditional single-exposure lithography, adjacent identical layout features will have identical mean critical dimension… CONTINUE READING