Time Response Dynamics of Linear Model of Microcantilever-mems

Abstract

This paper presents analytic derivation of dynamic behavior of a liniearized micro-electro-mechanical resonator. The parametric oscillation results from a displacement-dependent electrostatic force generated by oscillation of a microbeam. The utilized device is a MEMS with a time-varying capacitor. The stability and steady state dynamic behavior of the MEMS… (More)

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