Tilt-angle stabilization of electrostatically actuated micromechanical mirrors beyond the pull-in point

  title={Tilt-angle stabilization of electrostatically actuated micromechanical mirrors beyond the pull-in point},
  author={Jinghong Chen and W. Weingartner and Alexey Azarov and R. Giles},
  journal={Journal of Microelectromechanical Systems},
Recently proposed optical subsystems utilizing microelectromechanical system (MEMS) components are being developed for use in optical crossconnects, add-drop multiplexers, and spectral equalizers. Common elements to these subsystems are electrostatically actuated micromechanical mirrors that steer optical beams to implement the subsystem functions. In the past, feedback control methods were used to obtain precise mirror orientations to minimize loss through optical switch fabrics or to… CONTINUE READING
Highly Cited
This paper has 21 citations. REVIEW CITATIONS


Publications citing this paper.
Showing 1-10 of 15 extracted citations


Publications referenced by this paper.
Showing 1-10 of 25 references

and A

  • J. H. Chen, W. Weingar
  • Azarov, “Tilt-angle stabilization of…
  • 2001
Highly Influential
3 Excerpts

Current drive methods to extend the range of travel of electrostatic microactua - tors beyond the voltage pullin point

  • B. E. Boser
  • J . Microelectromech . Syst .
  • 2002

Multi-service optical node based on lowloss MEMS optical crossconnect switch,

  • R. Ryf, D. T. Neilsen
  • in Proc. Opt. Fiber Commun. Conf., Mar
  • 2002

Opportunities and challenges for MEMS in lightwave communications,

  • L. Y. Lin, E. L. Goldstein
  • IEEE J. Select. Topics Quantum Electron.,
  • 2002
2 Excerpts

The Lucent LambdaRouter: MEMS technology of the future here today,

  • D. J. Bishop, C. R. Giles, G. P. Austin
  • IEEE Commun. Mag.,
  • 2002

and L

  • R. Nadal-Guardia, A. Dehe, R. Aigner
  • M. Castaner, “Current drive methods to extend the…
  • 2002
2 Excerpts

MEMS technology for optical interconnect and networking applications,

  • A. Neukermans
  • Proc. IEEE Lasers Electro-Optics Soc. Conf.,
  • 2001

Microsystem Design

  • S. D. Senturia
  • Boston, MA: Kluwer Academic
  • 2001
1 Excerpt

Similar Papers

Loading similar papers…