Tilt-angle stabilization of electrostatically actuated micromechanical mirrors beyond the pull-in point

@article{Chen2004TiltangleSO,
  title={Tilt-angle stabilization of electrostatically actuated micromechanical mirrors beyond the pull-in point},
  author={Jinghong Chen and W. Weingartner and Alexey Azarov and R. Giles},
  journal={Journal of Microelectromechanical Systems},
  year={2004},
  volume={13},
  pages={988-997}
}
Recently proposed optical subsystems utilizing microelectromechanical system (MEMS) components are being developed for use in optical crossconnects, add-drop multiplexers, and spectral equalizers. Common elements to these subsystems are electrostatically actuated micromechanical mirrors that steer optical beams to implement the subsystem functions. In the past, feedback control methods were used to obtain precise mirror orientations to minimize loss through optical switch fabrics or to… CONTINUE READING
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