TiO2 Based Nanocrystalline Thin Film Gas Sensors Prepared by Ion-assisted Electron beam Evaporation

Abstract

In this work, we develop TiO<sub>2</sub> based nanocrystalline thin films prepared by ion-assisted e-beam evaporation process. N-type and p-type TiO<sub>2</sub> gas-sensing layers have been deposited by doping with various metal oxide materials including WO<sub>3</sub>, MoO<sub>3</sub>, and NiO<sub>x</sub>. Structural and morphological characterization by… (More)

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