Three-phase capacitive position sensing

  title={Three-phase capacitive position sensing},
  author={Robert G. Walmsley and Matthew A. Hopcroft and Peter G. Hartwell and George Corrigan and Don M Milligan},
  journal={2010 IEEE Sensors},
We present a novel sensing scheme for capacitive position sensors based on physical and electrical modifications of traditional sensing arrangements. In addition to improved sensitivity, this “three-phase” sensing scheme enables a purely electrical method for post-process compensation of fabrication tolerances that can be implemented in the signal conditioning circuitry. This same method can be also be used to trim the sensor output for cancelling biases or nulling offsets, allowing the sensor… CONTINUE READING

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Three phase capacitance-based sensing and actuation

  • R. G. Walmsley
  • USPTO 7484411 (Hewlett-Packard Company), 2009.
  • 2009
1 Excerpt

Capacitive Sensors: Design and Applications

  • L. K. Baxter
  • 1996
1 Excerpt

Mechanical-thermal noise in micromachined acoustic and vibration sensors

  • T. B. Gabrielson
  • IEEE Transactions on Electron Devices, vol. 40…
  • 1993
1 Excerpt

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