Reduction of non-orthogonality effect in nanometrology system by modified optics and signal conditioner
We present a simple scheme for thermal frequency stabilization of a three-longitudinal-mode He-Ne laser at 633 nm with improved short-term (5 x 10(-11) at 1-s average time) and long-term (124-kHz standard deviation for 10 h) frequency stability. A stabilized output power of 3 mW was readily obtained from the central mode by polarization-mode selection. The optical frequency of the central mode could be precisely tuned by an external frequency reference over 160 MHz with high precision or could be optically phase locked to a reference laser by use of a thermal frequency-stabilization circuit and an external acousto-optic modulator. The laser will be useful in various applications for which a laser source with high power and frequency stability is necessary.