Three-dimensional sound intensity measurements using Microflown particle velocity sensors

@article{Bree1999ThreedimensionalSI,
  title={Three-dimensional sound intensity measurements using Microflown particle velocity sensors},
  author={H.-E. de Bree and W. F. Druyvesteyn and Erwin J. W. Berenschot and M. C. Elwenspoek},
  journal={Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)},
  year={1999},
  pages={124-129}
}
This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micromachined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realised based on a three-dimensional micromachined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone. 
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