Three-dimensional microfabrication with two-photon-absorbed photopolymerization.

@article{Maruo1997ThreedimensionalMW,
  title={Three-dimensional microfabrication with two-photon-absorbed photopolymerization.},
  author={Shoji Maruo and Osamu Nakamura and Sumio Kawata},
  journal={Optics letters},
  year={1997},
  volume={22 2},
  pages={
          132-4
        }
}
We propose a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption with a pulsed infrared laser. An experimental system for the microfabrication has been developed with a Ti:sapphire laser whose oscillating wavelength and pulse width are 790 nm and 200 fs, respectively. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate… 
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1,356 Citations

Two-photon-absorbed photopolymerization for three-dimensional microfabrication

  • S. MaruoS. Kawata
  • Materials Science
    Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
  • 1997
We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An experimental system for the microfabrication has been developed with a…

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Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption.

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Photopolymerizable resin is lately one of the most attractive materials for manufacturing optical microdevices and complex three-dimensional(3D) structures. We have been studying the photofabrication…

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Three-dimensional micro-fabrication with two-photon and single-photon polymerization

  • S. Kawata
  • Physics
    Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557)
  • 2001
The theory, instrumentation and applications of three-dimensional microfabrication are given with a variety of examples. Structures shown include: SEM images of a 10 /spl mu/m bull and a…

Two-photon polymerization process for optically driven micromachines

Exposure of optically curing resin with highly focussed femtosecond laser pulses provides excellent means to produce high resolution micron sized structures. We use the process to fabricate…
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