Three-dimensional microfabrication with two-photon-absorbed photopolymerization.

  title={Three-dimensional microfabrication with two-photon-absorbed photopolymerization.},
  author={Shoji Maruo and Osamu Nakamura and Sumio Kawata},
  journal={Optics letters},
  volume={22 2},
We propose a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption with a pulsed infrared laser. An experimental system for the microfabrication has been developed with a Ti:sapphire laser whose oscillating wavelength and pulse width are 790 nm and 200 fs, respectively. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate… 

Two-photon-absorbed photopolymerization for three-dimensional microfabrication

  • S. MaruoS. Kawata
  • Materials Science
    Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
  • 1997
We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An experimental system for the microfabrication has been developed with a

Three-dimensional microfabrication by two-photon-initiated polymerization with a low-cost microlaser.

It is shown that resins based on the authors' highly sensitive two-photon photoinitiator can be solidified with microlaser excitation, whereas commercial UV photoresins require ultrashort and intense laser pulses.

Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption.

A resin pre-exposure technique by which freely movable components affixed to an axle are built, demonstrating a new application of TPA in laser microfabrication is proposed and utilized, demonstrating the inherent utility of Tpa in the fabrication of real 3D patterns.

3D Stereolithography by Using Two-Photon Photopolymerization

This article describes the development and evolution of two-photon lithography of 3 -dimensional ( 3 D) polymeric structures through two-photon photopolymerization (TPP) and the materials used to

Micro/nanofabrication of two and three dimensional structures by two-photon polymerization

Femtosecond infrared laser pulses are useful for laser micro/nanofabrication of two and three dimensional (2D & 3D) structures through multiphoton process. 2D & 3D polymeric structures were

Single-photon and two-photon photopolymerization for micro-nano fabrication

Photopolymerizable resin is lately one of the most attractive materials for manufacturing optical microdevices and complex three-dimensional(3D) structures. We have been studying the photofabrication

Optical microstructures fabricated by femtosecond laser two-photon polymerization

We investigated the feasibility of two-photon absorption (TPA) photopolymerization of methyl methacrylate initiated by a bimolecular system composed of 7-diethylamino-3-(2'-benzimidazolyl) coumarin

Three-dimensional micro-fabrication with two-photon and single-photon polymerization

  • S. Kawata
  • Physics
    Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557)
  • 2001
The theory, instrumentation and applications of three-dimensional microfabrication are given with a variety of examples. Structures shown include: SEM images of a 10 /spl mu/m bull and a

Two-photon polymerization process for optically driven micromachines

Exposure of optically curing resin with highly focussed femtosecond laser pulses provides excellent means to produce high resolution micron sized structures. We use the process to fabricate



Two-photon lithography for microelectronic application

Two-photon excitation in laser scanning photolithography allows exposure of patterns not possible with conventional one-photon direct writing. In our experiments two red photons from a highly focused

Self-focusing and self-trapping of optical beams upon photopolymerization.

It is demonstrated theoretically and experimentally that optical beams are self-focused and self-trapped upon initiating photopolymerization and the resulting nonlinear wave equation is shown to be nonlocal in time and displays self-Trapped solutions only for sufficiently low average optical intensities.

Optically induced rotation of anisotropic micro‐objects fabricated by surface micromachining

Optical trapping and directional high‐speed rotation by radiation pressure are demonstrated for anisotropic micro‐objects fabricated by reactive ion‐beam etching. These micro‐objects, which have

Two-photon laser scanning fluorescence microscopy.

The fluorescence emission increased quadratically with the excitation intensity so that fluorescence and photo-bleaching were confined to the vicinity of the focal plane as expected for cooperative two-photon excitation.

Scanning-force microscope based on an optical trap.

This gentler technique should improve the sensitivity of scanning-force microscopy for the imaging of soft samples in aqueous media.

A two-photon scanning fluorescence microscope with deep UV excitation and near UV detection

A two-photon scanning fluorescence microscope with deep UV excitation and near UV detection. A new scanning fluorescence microscope with the two-photon excitation in deep UV region and the detection

Optically driven Mie particles in an evanescent field along a channeled waveguide.

Experiments in which Mie-scattering particles were optically driven in the evanescent field that is generated in a channeled waveguide found polystyrene latex spheres with diameters of 1-5 microm laterally trapped and longitudinally driven along the direction of the waveguide channel.

Two-photon excitation in laser scanning fluorescence microscopy

Simultaneous absorption of two red photons from a strongly focused subpicosecond colliding pulse mode4ocked dye laser stimulates visible fluorescence emission from fluorophores having their normal

Near-Field Scanning Optical Microscope with a Laser Trapped Probe

We made an experiment of near-field microscopic imaging using a laser-beam trapped probe. Differently from a conventional near-field (and/or photon-tunneling) scanning optical microscope, the probe