Three-dimensional microfabrication with two-photon-absorbed photopolymerization.

@article{Maruo1997ThreedimensionalMW,
  title={Three-dimensional microfabrication with two-photon-absorbed photopolymerization.},
  author={Shoji Maruo and Osamu Nakamura and Sumio Kawata},
  journal={Optics letters},
  year={1997},
  volume={22 2},
  pages={
          132-4
        }
}
We propose a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption with a pulsed infrared laser. An experimental system for the microfabrication has been developed with a Ti:sapphire laser whose oscillating wavelength and pulse width are 790 nm and 200 fs, respectively. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate… 

Two-photon-absorbed photopolymerization for three-dimensional microfabrication

  • S. MaruoS. Kawata
  • Materials Science
    Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
  • 1997
We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An experimental system for the microfabrication has been developed with a

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  • S. Kawata
  • Physics
    Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557)
  • 2001
The theory, instrumentation and applications of three-dimensional microfabrication are given with a variety of examples. Structures shown include: SEM images of a 10 /spl mu/m bull and a

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...

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