Three dimensional microfabrication in ceramics by solid state lasers

@article{Weichenhain1999ThreeDM,
  title={Three dimensional microfabrication in ceramics by solid state lasers
},
  author={Ruth Weichenhain and Alexander Horn and E. W. Kreutz},
  journal={Applied Physics A},
  year={1999},
  volume={69},
  pages={S855-S858}
}
Abstract. Nano- and picosecond laser radiation offers better possibilities by achieving higher accuracy in microstructuring because of much lower heat load compared to larger pulses. The influence of wavelength, pulse energy, overlap and the properties of processing gas atmosphere on material removal and roughness of ceramics are investigated for ns-pulses. The removal threshold and the removal rate per pulse for ns- and ps- laser pulses are presented. Strategies, which reduce the surface… CONTINUE READING

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