Three-dimensional micro electromechanical system piezoelectric ultrasound transducer

@article{Hajati2012ThreedimensionalME,
  title={Three-dimensional micro electromechanical system piezoelectric ultrasound transducer},
  author={A. Hajati and D. Latev and D. Gardner and Azadeh Hajati and D. Imai and Marc Torrey and M. Schoeppler},
  journal={Applied Physics Letters},
  year={2012},
  volume={101},
  pages={253101}
}
Here we present the design and experimental acoustic test data for an ultrasound transducer technology based on a combination of micromachined dome-shaped piezoelectric resonators arranged in a flexible architecture. Our high performance niobium-doped lead zirconate titanate film is implemented in three-dimensional dome-shaped structures, which form the basic resonating cells. Adjustable frequency response is realized by mixing these basic cells and modifying their dimensions by lithography… Expand

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