Three-dimensional micro electromechanical system piezoelectric ultrasound transducer

  title={Three-dimensional micro electromechanical system piezoelectric ultrasound transducer},
  author={Arman Hajati and Dimitre Latev and Deane A. Gardner and Azadeh Hajati and Darren Imai and Marc Torrey and Martin Schoeppler},
  journal={Applied Physics Letters},
Here we present the design and experimental acoustic test data for an ultrasound transducer technology based on a combination of micromachined dome-shaped piezoelectric resonators arranged in a flexible architecture. Our high performance niobium-doped lead zirconate titanate film is implemented in three-dimensional dome-shaped structures, which form the basic resonating cells. Adjustable frequency response is realized by mixing these basic cells and modifying their dimensions by lithography… 

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