Three-dimensional micro electromechanical system piezoelectric ultrasound transducer

@article{Hajati2012ThreedimensionalME,
  title={Three-dimensional micro electromechanical system piezoelectric ultrasound transducer},
  author={Arman Hajati and Dimitre Latev and Deane A. Gardner and Azadeh Hajati and Darren Imai and Marc Torrey and Martin Schoeppler},
  journal={Applied Physics Letters},
  year={2012},
  volume={101},
  pages={253101}
}
Here we present the design and experimental acoustic test data for an ultrasound transducer technology based on a combination of micromachined dome-shaped piezoelectric resonators arranged in a flexible architecture. Our high performance niobium-doped lead zirconate titanate film is implemented in three-dimensional dome-shaped structures, which form the basic resonating cells. Adjustable frequency response is realized by mixing these basic cells and modifying their dimensions by lithography… 

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References

SHOWING 1-10 OF 25 REFERENCES

Ultrasound radiating performances of piezoelectric micromachined ultrasonic transmitter

This letter reports on a membrane-type piezoelectric micromachined ultrasonic transducer (pMUT). It consists of 3.5 or 7μm thick composite lead zirconate titanate (PZT) film on a multilayered

Piezoelectric thin film platform for ultrasound transducer arrays

A piezoelectric thin film MEMs technology platform has been developed that enables processing of miniaturized ultrasound transducer arrays with only minimum 2 mask steps. The thin film ultrasound

Piezoelectric micromachined transducers (PMUT's) based on PZT thin films

Test structures for piezoelectric micromachined ultrasonic transducers have been fabricated and investigated. The basic element consisted of a silicon membrane coated with a 2 /spl mu/m thick

Capacitive micromachined ultrasonic transducers for medical imaging and therapy.

TLDR
The presented results prove the CMUT as a MEMS technology for many medical diagnostic and therapeutic applications as well as the progression of developing several generations of fabrication processes.

Ultra-wide bandwidth piezoelectric energy harvesting

Here, we present an ultra wide-bandwidth energy harvester by exploiting the nonlinear stiffness of a doubly clamped microelectromechanical systems (MEMSs) resonator. The stretching strain in a doubly

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

This paper describes fabrication arid characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-/spl mu/m-thick Pb(Zr/sub 0.53/Ti/sub 0.47/O/sub 3/) (PZT) thin

Thin Film Piezoelectric MEMs Devices

Thin film piezoelectric devices, processed in Si‐related processes, are attractive for ultrasound transducers and piezoelectric switches. Thin film ultrasound transducer enable large bandwidth (>

Thin Film Piezoelectrics for MEMS

Thin film piezoelectric materials offer a number of advantages in microelectromechanical systems (MEMS), due to the large motions that can be generated, often with low hysteresis, the high available

11F-3 Performance of Flexure-Mode pMUT 2D Arrays

We report on the performance characteristics of 2D pMUT arrays. 2D arrays suitable for diagnostic ultrasound imaging containing 81 elements were bulk micromachined in silicon substrates. The devices