Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer

  title={Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer},
  author={B.-H. Jo and L. M. Van Lerberghe and K. M. Motsegood and D E Beebe},
  journal={Journal of Microelectromechanical Systems},
This paper describes a fabrication technique for building three-dimensional (3-D) micro-channels in polydimethylsiloxane (PDMS) elastomer. The process allows for the stacking of many thin (less than 100-/spl mu/m thick) patterned PDMS layers to realize complex 3-D channel paths. The master for each layer is formed on a silicon wafer using an epoxy-based… CONTINUE READING