Three-dimensional imaging using digital holography and scanning electron microscopy

Abstract

In this work, we present a patented procedure that generates three dimensional (3D) image of a microscopic object with high definition, obtained by merging Scanning Electron Microscopy (SEM) and Digital Holography Microscopy (DHM) data. A high spatial resolution (up to r<sub>z</sub>=&#x03BB;/20, r<sub>yx</sub>&#x2245;100nm) 3D model of the object is… (More)

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Cite this paper

@article{Dardano2014ThreedimensionalIU, title={Three-dimensional imaging using digital holography and scanning electron microscopy}, author={Principia Dardano and M. A. Ferrara and Luca De Stefano and Giuseppe Coppola and Ilaria Rea and Edoardo De Tommasi and Ivo Rendina}, journal={2014 Fotonica AEIT Italian Conference on Photonics Technologies}, year={2014}, pages={1-4} }