Three-dimensional composition profiles of single quantum dots determined by scanning-probe-microscopy-based nanotomography.

@article{Rastelli2008ThreedimensionalCP,
  title={Three-dimensional composition profiles of single quantum dots determined by scanning-probe-microscopy-based nanotomography.},
  author={A. Rastelli and Mathieu Stoffel and Angelo Malachias and T. Merdzhanova and Georgios Katsaros and K. Kern and Till Hartmut Metzger and Oliver G. Schmidt},
  journal={Nano letters},
  year={2008},
  volume={8 5},
  pages={1404-9}
}
Scanning probe microscopy combined with selective wet chemical etching is employed to quantitatively determine the full three-dimensional (3D) composition profiles of single strained SiGe/Si(001) islands. The technique allows us to simultaneously obtain 3D profiles for both coherent and dislocated islands and to collect data with large statistics. Lateral and vertical composition gradients are observed, and their origin is discussed. X-ray scattering measurements performed on a large sample… CONTINUE READING

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