Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator

@article{Sasaki2004ThreedimensionalSC,
  title={Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator},
  author={Maki Sasaki and Danick Briand and Wilfried Noell and N. F. de Rooij and Kazuhiro Hane},
  journal={IEEE Journal of Selected Topics in Quantum Electronics},
  year={2004},
  volume={10},
  pages={455-461}
}
A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and obtainable accuracy of the displacement are examined. Using the lateral dimension control of the bridge and the supporting beams, the vertical positioning is realized based on the planer photolithography. As a demonstration, a vertical comb… CONTINUE READING
Highly Cited
This paper has 22 citations. REVIEW CITATIONS

Citations

Publications citing this paper.
Showing 1-10 of 14 extracted citations

References

Publications referenced by this paper.
Showing 1-10 of 27 references

Monolithic high aspect ratio two-axis optical scanners in SOI

  • V. Milanovic, G. A. Matus, T. Cheng, B. Cagdaser
  • Proc. 16th IEEE Int. Conf. Micro Electro…
  • 2003
1 Excerpt

Si-wafer bending technique for a three-dimensional microoptical bench

  • M. Ishimori, J. H. Song, M. Sasaki, K. Hane
  • Jpn. J. Appl. Phys., pt. 1, vol. 6B, pp. 4063…
  • 2003
1 Excerpt

Bonding of silicon scanning mirror having vertical comb fingers

  • J.-H. Lee, Y.-C. Ko, B.-S. Choi, J.-M. Kim, D. Y. Jeon
  • J. Micromech. Microeng., vol. 12, pp. 644–649…
  • 2002

Design and fabrication of scanning mirror for laser display

  • J.-H. Lee, Y.-C. Ko, D.-H. Kong, J.-M. Kim, K. B. Lee, D.-Y. Jeon
  • Sens. Actuators, A, vol. A96, pp. 223–230, 2002.
  • 2002
1 Excerpt

Process for high speed Micro Electro Mechanical Systems (MEMS) scanning mirrors with vertical comb drives

  • H. Wada, D. Lee, U. Krishnamoorthy, S. Zappe, O. Solgaard
  • Jpn. J. Appl. Phys., vol. 41, pp. L899–L901, 2002…
  • 2002

Similar Papers

Loading similar papers…