Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator

  title={Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator},
  author={Maki Sasaki and Danick Briand and Wilfried Noell and N. F. de Rooij and Kazuhiro Hane},
  journal={IEEE Journal of Selected Topics in Quantum Electronics},
A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and obtainable accuracy of the displacement are examined. Using the lateral dimension control of the bridge and the supporting beams, the vertical positioning is realized based on the planer photolithography. As a demonstration, a vertical comb… CONTINUE READING
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