Three dimensional ALD of TiO<inf>2</inf> for in-vivo biomedical sensor applications

Abstract

Titanium dioxide, known as a high-k biocompatible dielectric transducer material, is processed by means of ALD and applied to a 3D structure with dimensions typical for multi-site multi-channel in-vivo neural interfaces. High uniformity, high areal capacitance, and in particular low leakage current densities are achieved within a sufficiently wide operation… (More)

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Cite this paper

@article{Schroder2015ThreeDA, title={Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications}, author={Sven Schroder and Ozgu Dogan and Jessica Schneidewind and Gabriel Bertotti and Stefan Keil and Hassan Gargouri and Michael Arens and Evelin Brose and Jurgen Bruns and D. Wolansky and Bernd Tillack and Stefano Vassanelli and Bernd Szyszka and Roland Thewes}, journal={2015 6th International Workshop on Advances in Sensors and Interfaces (IWASI)}, year={2015}, pages={21-24} }