Three-axis Piezoresistive Accelerometer with Uniform Axial Sensitivities

  title={Three-axis Piezoresistive Accelerometer with Uniform Axial Sensitivities},
  author={Tran Duc Tan and Nguyen Tien Anh},
  journal={2011 Second International Conference on Intelligent Systems, Modelling and Simulation},
A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was developed using Micro Electro Mechanical Systems (MEMS) technology. This sensor which is made of a heavy proof mass and four long beams allow us to obtain high sensitivities by reducing the resonant frequencies. Uniform axial sensitivities with small cross axis sensitivity could be obtained by a three-dimensional sensor structure. 

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