Three-Dimensional Fin-Structured Semiconducting Carbon Nanotube Network Transistor.


Three-dimensional (3-D) fin-structured carbon nanotube field-effect transistors (CNT-FETs) with purified 99.9% semiconducting CNTs were demonstrated on a large scale 8 in. silicon wafer. The fabricated 3-D CNT-FETs take advantage of the 3-D geometry and exhibit enhanced electrostatic gate controllability and superior charge transport. A trigated structure… (More)
DOI: 10.1021/acsnano.6b05429