Thin film valve device using flow hole closing membrane

@inproceedings{2013ThinFV,
  title={Thin film valve device using flow hole closing membrane},
  author={柳在泉},
  year={2013}
}
A thin film valve device according to the present invention includes: at least one chamber for storing a fluid required for biological or biochemical analysis or for carrying out biological or biochemical reaction; a channel for connecting to at least one chamber so as to transport the fluid; a flow hole arranged to communicate with the channel; a closing membrane for closing the flow hole; a thin film valve consisting of the flow hole and the closing membrane; a plurality of substrates stacked… CONTINUE READING