Thin-film microstrip lines for MM and sub-MM/wave on-chip interconnects

@article{Heiliger1997ThinfilmML,
  title={Thin-film microstrip lines for MM and sub-MM/wave on-chip interconnects},
  author={H.-M. Heiliger and Matthias Nagel and H. G. Roskos and H. Kurz and Frank Schnieder and Wolfgang Heinrich},
  journal={1997 IEEE MTT-S International Microwave Symposium Digest},
  year={1997},
  volume={2},
  pages={421-424 vol.2}
}
Thin-film microstrip lines with a polymer dielectric between ground and signal conductor are proven to be an attractive alternative to coplanar waveguides for (sub)-MM-wave interconnects. Both simulation and electrooptic characterization reveal negligible modal dispersion up to 1000 GHz and low attenuation even if the lines are realized on low-resistivity substrates.