Thin-film formation system and thin-film formation process

@inproceedings{2001ThinfilmFS,
  title={Thin-film formation system and thin-film formation process},
  author={이와세히데오 and 카메야마마코토 and 키타니코지 and 호시요이치},
  year={2001}
}
PURPOSE: A thin-film formation apparatus having a chamber consisting basically of a sputtering space and a film-forming space and a grid plate disposed between the sputtering space and the film-forming space, and a thin-film formation process making use of this apparatus are provided. CONSTITUTION: The thin-film formation process for forming a thin film by means of a sputtering apparatus having a chamber comprising a sputtering space and a film-forming space and a grid plate disposed between… CONTINUE READING