Thin film bulk acoustic wave filter

@article{Ylilammi2002ThinFB,
  title={Thin film bulk acoustic wave filter},
  author={Markku Ylilammi and J. Ella and Matti Partanen and Jyrki Kaitila},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2002},
  volume={49},
  pages={535-539}
}
Thin film bulk acoustic wave (BAW) resonators (FBAR) are fabricated on a silicon nitride bridge using a ZnO piezolayer on a glass substrate and surface micromachining by standard thin film technology. These resonators exhibit a coupling constant k/sub t//sup 2/=7.8% at the first thickness extensional wave mode and are used as impedance elements in a ladder filter in the 1-GHz frequency band of mobile telecommunications. An electrical equivalent circuit is used to characterize the properties of… CONTINUE READING
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References

Publications referenced by this paper.
Showing 1-10 of 27 references

Growth and applications of group IIInitrides

  • O. Ambacher
  • J. Phys. D: Appl. Phys., vol. 31, no. 20, pp…
  • 1998
Highly Influential
4 Excerpts

Piezoelectric transducer materials

  • H. Jaffe, D. A. Berlincourt
  • Proc. IEEE, vol. 53, no. 10, pp. 1372–1386, 1965.
  • 1965
Highly Influential
3 Excerpts

A BAW antenna duplexer for the 1900 MHz PCS band

  • J. D. Larson, S.M.R. Ruby, P. Bradley, Y. Oshmyansky
  • 1999 IEEE Int. Ultrason. Symp., pp. 17–20.
  • 1999
1 Excerpt

An American national standard, IEEE standard on piezoelectricity, ANSI IEEE Std 176- 1987 (1988)

  • A. H. Meitzler, D. Berlincourt, +4 authors A. W. Warner
  • IEEE Trans. Ultrason., Ferroelect., Freq. Contr…
  • 1996
1 Excerpt

Micromachined cellular filters acoustic resonators

  • S.M.R. Ruby
  • IEEE Microwave Theory Tech. Symp. Digest, pp…
  • 1996
2 Excerpts

High performance microwave air-bridge resonators

  • C. W. Seabury, J. T. Cheung, P. H. Kobrin, R. Addison, D. P. Havens
  • IEEE Ultrason. Symp. Proc., pp. 909–911, 1995.
  • 1995
2 Excerpts

Solidly mounted resonators and filters

  • K. M. Lakin, K. T. McCarron, R. E. Rose
  • IEEE Ultrason. Symp., pp. 905–908, 1995.
  • 1995
1 Excerpt

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