Thin Film Oxides Of Vanadium, Niobium, And Tantalum For Integrated Optics

@inproceedings{Davis1983ThinFO,
  title={Thin Film Oxides Of Vanadium, Niobium, And Tantalum For Integrated Optics},
  author={Richard L. Davis and Fred S. Hickernell},
  booktitle={Other Conferences},
  year={1983}
}
Thin films of V2O5, Nb2O5, and Ta2O5 have been grown under a variety of conditions including reactive rf sputtering, reactive bias sputtering, and post deposition oxidation. The refractive index and guided-wave attenuation have been measured for both as-grown and annealed films. Except for V205, where low losses were not achieved, general guidelines were established for optimal growth conditions resulting in high refractive index low loss films. Films of Nb2O5 and Ta2O5 have been used in the… CONTINUE READING