Thin Film Materials: Stress, Defect Formation and Surface Evolution

@inproceedings{Freund2004ThinFM,
  title={Thin Film Materials: Stress, Defect Formation and Surface Evolution},
  author={L. Ben Freund and S Palaniyandi Suresh},
  year={2004}
}
1. Introduction and overview 2. Film stress and substrate curvature 3. Stress in anisotropic and patterned films 4. Delamination and fracture 5. Film buckling, bulging and peeling 6. Dislocation formation in epitaxial systems 7. Dislocation interactions and strain relaxation 8. Equilibrium and stability of surfaces 9. The role of stress in mass transport. 

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