Thick-film piezoresistors - benchmarking of LTCC substrates

The ceramic micro electro-mechanical systems (C-MEMS) are fabricated in most cases by low-temperature co-fired ceramics (LTCC). The sensors of mechanical quantities are fundamental parts of MEMS, and thick-film resistor can sense mechanical deformations in the C-MEMS structures. Relatively low elastic moduli of LTCC ceramics as compared to alumina ceramics… (More)