Thermocapillary Actuation of Millimeter-Scale Rotary Structures

  title={Thermocapillary Actuation of Millimeter-Scale Rotary Structures},
  author={Erwin Hendarto and Yogesh B. Gianchandani},
  journal={Journal of Microelectromechanical Systems},
In this paper, we describe the rotary motion, by Marangoni flow, of a millimeter-scale rotary structure immersed in a thin layer of liquid. A 16 × 8 array of 1 × 0.8 × 0.3 mm3 surface-mount resistors is suspended ≈ 500 μm above the liquid to serve as a programmable heat source. The continuous operation of resistor elements is used to impose a spatially… CONTINUE READING