Thermo-Kinetic Actuation for Batch Assembly of Microscale Hinged Structures

  title={Thermo-Kinetic Actuation for Batch Assembly of Microscale Hinged Structures},
  author={Ville Kaajakari and Amit Lal},
This paper reports on surface micromachined hinged structure assembly using thermo-kinetic forces in the molecular flow regime. Ultrasonic vibration energy is used to reduce the static friction making the thermo-kinetic force comparatively significant. The thermo-kinetic force, resulting from the more energetic gas molecules emanating from the heated substrate, increases with pressure and substrate temperature in the molecular flow regime. The transition from viscous to molecular regime occurs… CONTINUE READING


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