Thermal strain measurement in sol-gel lead zirconate titanate thin films

A fluorescence-based digital image correlation !DIC" technique is used to characterize the in-plane strain development of blanket sol-gel derived lead zirconate titanate thin films deposited on platinized silicon substrates. The in-plane strain is also measured within film line features patterned via a mediated octadecyltrichlorosilane !ODS" monolayer. The… CONTINUE READING