Thermal stability, sublimation pressures and diffusion coefficients of some metal acetylacetonates

@inproceedings{Siddiqi2007ThermalSS,
  title={Thermal stability, sublimation pressures and diffusion coefficients of some metal acetylacetonates},
  author={M. A. Siddiqi and Rehan A. Siddiqui and Burak Atakan},
  year={2007}
}
Metal acetylacetonates are often used as precursors for the deposition of oxides in CVD or ALE experiments. The thermal stability and the vapour/sublimation pressures of such compounds are of fundamental importance for reproducible depositions. We have started a program to study the long term thermal stability, sublimation pressures and the diffusion coefficients of organometallic compounds. The latter are needed for the calculation of the Sherwood and Lewis numbers used to describe mass… CONTINUE READING