Thermal management of silicon micro robot driven by neural networks IC control SMA actuator

Abstract

This paper discusses both thermal management of a microrobot and a control IC. The developed microrobot is fabricated by the MEMS (Micro Electro Mechanical Systems) technology. The miniature actuator is constructed by SMA (Shape Memory Alloy) wires and a rotor. It shows rotational motion by heating and cooling process of the SMA wire. Moreover, artificial… (More)

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Cite this paper

@article{Takato2017ThermalMO, title={Thermal management of silicon micro robot driven by neural networks IC control SMA actuator}, author={Minami Takato and Yasukazu Nakata and Yuto Uchiumi and Terumitsu Tanaka and K. Saito and Fumio Uchikoba}, journal={2017 International Conference on Electronics Packaging (ICEP)}, year={2017}, pages={193-198} }