Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization

@article{Beauchne2003ThermalLS,
  title={Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization},
  author={T. Beauch{\^e}ne and Dean Lewis and Felix Beaudoin and Vincent Pouget and Romain Desplats and Pascal Fouillat and Philippe Perdu and Marise Bafleur and David Tr{\'e}mouilles},
  journal={Microelectronics Reliability},
  year={2003},
  volume={43},
  pages={439-444}
}
This paper presents an experimental comparison of laser beam based techniques applied to a case study concerning ESD defect location. Thermal laser stimulation and non-biased optical beam induced current techniques are evaluated and discussed. Experimental results demonstrate the advantages and weak points of the two approaches. 2003 Elsevier Science Ltd. All rights reserved.