Thermal diffusivity sensing: A new temperature sensing paradigm

  title={Thermal diffusivity sensing: A new temperature sensing paradigm},
  author={Caspar P. L. van Vroonhoven and Kofi A. A. Makinwa},
  journal={2011 IEEE Custom Integrated Circuits Conference (CICC)},
This paper presents an overview of recently developed absolute temperature sensors based on the measurement of the thermal diffusivity of silicon, D. Such sensors make use of the fact that, in IC-grade silicon, D has a well-defined temperature dependence and is insensitive to process spread. D can be determined by measuring the thermal delay between an on-chip heater and an on-chip relative temperature sensor This delay can then be digitized or used to define the output frequency of an… CONTINUE READING