Thermal conductivity of heavily doped LPCVD polysilicon

@article{Tai1987ThermalCO,
  title={Thermal conductivity of heavily doped LPCVD polysilicon},
  author={Y. C. Tai and C J Mastrangelo and R. S. Muller},
  journal={1987 International Electron Devices Meeting},
  year={1987},
  pages={278-281}
}
We report the first experimental values for the thermal conductivity κσof polycrystalline silicon, an important design parameter for polysilicon micromechanics applied to sensors [1,2]. Because conventional methods to measure κσ[3] are inappropriate for thin-film materials, we introduce a new technique that makes use of an inhomogeneously doped polysilicon microbridge. A bias is applied across the bridge and current-voltage characteristics are measured when the bridge is in vacuum and again… CONTINUE READING
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