Thermal conductivity manipulation in single crystal silicon via lithographycally defined phononic crystals

@article{Kim2012ThermalCM,
  title={Thermal conductivity manipulation in single crystal silicon via lithographycally defined phononic crystals},
  author={Bongsang Kim and Janet Nguyen and Peggy J. Clews and Charles M. Reinke and Drew F. Goettler and Zayd C. Leseman and Ihab El-Kady and R. H. Olsson},
  journal={2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2012},
  pages={176-179}
}
The thermal conductivity of single crystal silicon was engineered to be as low as 32.6W/mK using lithographically defined phononic crystals (PnCs), which is only one quarter of bulk silicon thermal conductivity [1]. Specifically sub-micron through-holes were periodically patterned in 500nm-thick silicon layers effectively enhancing both coherent and incoherent phonon scattering and resulting in as large as a 37% reduction in thermal conductivity beyond the contributions of the thin-film and… CONTINUE READING

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