Thermal conductivity manipulation in single crystal silicon via lithographycally defined phononic crystals

  title={Thermal conductivity manipulation in single crystal silicon via lithographycally defined phononic crystals},
  author={Bongsang Kim and Janet Nguyen and Peggy J. Clews and Charles M. Reinke and Drew F. Goettler and Zayd C. Leseman and Ihab El-Kady and R. H. Olsson},
  journal={2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)},
The thermal conductivity of single crystal silicon was engineered to be as low as 32.6W/mK using lithographically defined phononic crystals (PnCs), which is only one quarter of bulk silicon thermal conductivity [1]. Specifically sub-micron through-holes were periodically patterned in 500nm-thick silicon layers effectively enhancing both coherent and incoherent phonon scattering and resulting in as large as a 37% reduction in thermal conductivity beyond the contributions of the thin-film and… CONTINUE READING


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Publications referenced by this paper.
Showing 1-8 of 8 references

Microfabricated phononic crystal devices ..

R. H. Olsson, I. El-Kady
Measurement Science and Technology, vol. 20, p. 012002, 2009. • 2009
View 1 Excerpt

A high force low area MEMS thermal actuator

M. J. Sinclair
ITHERM 2000., p. 132. • 2000
View 1 Excerpt

Ultrasonic Band Gap in a Periodic Two-Dimensional Composite

F. R. Montero de Espinosa
Phys. Rev. Lttrs., vol. 80, pp. 1208-1211, 1998. • 1998
View 1 Excerpt

Realization of optimal bandgaps in ..

C. M. Reinke
Appl. Phys. Lttrs., vol. 98, pp. 061912-3, 2011. • 1912
View 1 Excerpt

Design and fabrication ..

T. Huesgen
Sens. and Actuators A: Physical, vol. 145-146, pp. 423-429.
View 1 Excerpt

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