Thermal compensation for aluminum nitride Lamb wave resonators operating at high temperature

@article{Lin2010ThermalCF,
  title={Thermal compensation for aluminum nitride Lamb wave resonators operating at high temperature},
  author={Chih-Ming Lin and Ting-ta Yen and Valery V. Felmetsger and Matthew A. Hopcroft and Jan H. Kuypers and Albert P. Pisano},
  journal={2010 IEEE International Frequency Control Symposium},
  year={2010},
  pages={14-18}
}
Thermal compensation for aluminum nitride (AlN) Lamb wave resonators operating at high temperature is experimentally demonstrated in this study. By adding a compensating layer of silicon dioxide (SiO<inf>2</inf>), the turnover temperature can be designed for high temperature operation by varying the normalized AlN thickness (h<inf>AlN</inf>/λ) and the normalized SiO2 thickness (h<inf>SiO2</inf>/λ) in the AlN/SiO<inf>2</inf> composite stack. With different designs of h<inf>AlN</inf>/λ and h<inf… CONTINUE READING
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