Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides.

@article{Ikeda2008ThermalAK,
  title={Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides.},
  author={Kazuhiro Ikeda and Robert E. Saperstein and N. Alic and Yeshaiahu Fainman},
  journal={Optics express},
  year={2008},
  volume={16 17},
  pages={12987-94}
}
We introduce and present experimental evaluations of loss and nonlinear optical response in a waveguide and an optical resonator, both implemented with a silicon nitride/ silicon dioxide material platform prepared by plasma-enhanced chemical vapor deposition with dual frequency reactors that significantly reduce the stress and the consequent loss of the… CONTINUE READING

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