Thermal-Optic Switch by Total Internal Reflection of Micromachined Silicon Prism

  title={Thermal-Optic Switch by Total Internal Reflection of Micromachined Silicon Prism},
  author={T. Zhong and X. Zhang and A. Q. Liu and Jen-Yu Li and C. Lu and D. Y. Tang},
  journal={IEEE Journal of Selected Topics in Quantum Electronics},
This paper reports the conceptual design and experimental demonstration of an optical switch that utilizes the thermo-optic effect (TOE) and total internal reflection (TIR) of a micromachined silicon prism. The key idea is to change the refractive index of the prism via TOE to switch the light from the transmission state to the TIR state. The structure is fabricated by microelectromechanical systems (MEMS) technology on a silicon-on-insulator wafer. It requires a temperature change of 69 K to… CONTINUE READING
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Showing 1-10 of 31 references

Opportunities and challenges for MEMS in lightwave communications

  • L. Y. Lin, E. L. Goldstein
  • IEEE. J. Sel. Topics Quantum Electron., vol. 8…
  • 2002
Highly Influential
10 Excerpts

Temperature dependence analysis of the thermo-optic effect in silicon by single and double oscillator models

  • F.G.D. Corte, M. E. Montefusco, L. Moretti, I. Rendina, G. Cocorullo
  • J. Appl. Phys., vol. 88, no. 12, pp. 7115–7119…
  • 2000
Highly Influential
8 Excerpts

Principles of Optics, 6th ed

  • M. Born, E. Wolf
  • 1999
Highly Influential
3 Excerpts

Scattering and Diffraction in Physical Optics, 2nd ed

  • M. Nieto-Vesperinas
  • Hackensack, NJ: World Scientific,
  • 2006
1 Excerpt

Nonlinear optical tuning of a two-dimensional silicon photonic crystal

  • H. W. Tan, H. M. van Driel, S. L. Schweizer, R. B. Wehrspohn
  • Phys. Rev. B, vol. 70, no. 20, pp. 205110-1…
  • 2004
1 Excerpt

Optical age of silicon

  • G. T. Reed
  • Nature, vol. 427, pp. 595–596, 2004.
  • 2004
1 Excerpt

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