Thermal-Optic Switch by Total Internal Reflection of Micromachined Silicon Prism

@article{Zhong2007ThermalOpticSB,
  title={Thermal-Optic Switch by Total Internal Reflection of Micromachined Silicon Prism},
  author={T. Zhong and X. Zhang and A. Q. Liu and Jen-Yu Li and C. Lu and D. Y. Tang},
  journal={IEEE Journal of Selected Topics in Quantum Electronics},
  year={2007},
  volume={13},
  pages={348-358}
}
This paper reports the conceptual design and experimental demonstration of an optical switch that utilizes the thermo-optic effect (TOE) and total internal reflection (TIR) of a micromachined silicon prism. The key idea is to change the refractive index of the prism via TOE to switch the light from the transmission state to the TIR state. The structure is fabricated by microelectromechanical systems (MEMS) technology on a silicon-on-insulator wafer. It requires a temperature change of 69 K to… CONTINUE READING
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