Thermal Conductivity of Doped Polysilicon Layers

  title={Thermal Conductivity of Doped Polysilicon Layers},
  author={Angela D. McConnell and S. Uma and Kenneth E. Goodson},
The thermal conductivities of doped polysilicon layers depend on grain size and on the concentration and type of dopant atoms. Previous studies showed that layer processing conditions strongly influence the thermal conductivity, but the effects of grain size and dopant concentration were not investigated in detail. The current study provides thermal conductivity measurements for low-pressure chemical-vapor deposition (LPCVD) polysilicon layers of thickness near 1 m doped with boron and… CONTINUE READING
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